MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
نویسندگان
چکیده
Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: Thermometry is an interested field in physics and metrology. In this paper, a capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed. The governing thermo mechanical equations were derived and solved analytically. T he temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.
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